Course: Design of Micro and Nano Systems
Code: 3ФЕИТ12007
ECTS points: 6 ECTS
Number of classes per week: 3+0+0+3
Lecturer: Prof. Dr. Katerina Raleva
Course Goals (acquired competencies): This course offers a knowledge in the techniques of designing MEMS/NEMS based system. Ability to understand models for electrical and mechanical parts in a microelectromechanical system. Ability to analyze and to design MEMS/NEMS electrical circuits and systems.
Course Syllabus: Introduction-comparison between microsystem, microelectromechanical system and integrated electronic system. Microfabrication of MEMS elements and structures. MEMS sensors (accelerometer, gyroscope, pressure sensor)-fabrication and principles of operation. Modeling of MEMS elements-lumped modeling with circuit elements. Elasticity modeling. Dynamic lumpled circuit model for microsystem. Energy-conserving transducers. Modeling od dissipation processes in micro- and nano-systems. Electronic circuits and system with MEMS devices. Feedback systems – stability control. Noises in microsystems. Techniques for designing micro and nano-systems. Design integration.
Literature:
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Required Literature |
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No. |
Author |
Title |
Publisher |
Year |
|
1 |
Stephen D. Senturia | MICROSYSTEM DESIGN | KLUWER ACADEMIC PUBLISHERS | 2001 |
|
2 |
James J. Allen | Micro Electro Mechanical System Design | Taylor & Francis | 2005 |
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3 |
Milena Djukanovic, Goran Stojanovski | Lecture Notes on Microelectromechanical Systems | DRIIMS Tempus | 2012 |
