Micro and Nano Sensors

Објавено: February 28, 2019

Micro and Nano Sensors

Course: Micro and Nano Sensors

Code: 3ФЕИТ01008

ECTS points: 6 ECTS

Number of classes per week: 3+0+0+3

Lecturer: Assoc. Prof. dr. Goran Stojanovski

Course Goals (acquired competencies): The goal is to introduce the students with the concept of micro and nano sensors.

Course Syllabus: Introduction to micro and nano mechatronic systems. Overview of the physical phenomena used for design and implementation of micro and nano sensors. Characterization of different types of MEMS based sensors. Detailed explanation of thermal MEMS, radiation MEMS, mechanical MEMS, magnetic MEMS, bio-chemical MEMS etc. Characterization and verification of sensor properties in laboratory.

Literature:

Required Literature

No.

Author

Title

Publisher

Year

1

Milena Djukanovic, Goran StojanovskiLecture Notes on Microelectromechanical SystemsDRIIMS Tempus2012

2

Stephen Beeby, Graham Ensell, Michael Kraft, Neil WhiteMEMS Mechanical SensorsArtech House, Inc2004

3

Jan G. Korvink, Oliver PaulMEMS: A Practical Guide to Design, Analysis, and ApplicationsWilliam Andrew, Inc2006