Micro and Nano Sensors
Course: Micro and Nano Sensors
ECTS points: 6 ECTS
Number of classes per week: 3+0+0+3
Lecturer: Assoc. Prof. dr. Goran Stojanovski
Course Goals (acquired competencies): The goal is to introduce the students with the concept of micro and nano sensors.
Course Syllabus: Introduction to micro and nano mechatronic systems. Overview of the physical phenomena used for design and implementation of micro and nano sensors. Characterization of different types of MEMS based sensors. Detailed explanation of thermal MEMS, radiation MEMS, mechanical MEMS, magnetic MEMS, bio-chemical MEMS etc. Characterization and verification of sensor properties in laboratory.
|Milena Djukanovic, Goran Stojanovski||Lecture Notes on Microelectromechanical Systems||DRIIMS Tempus||2012|
|Stephen Beeby, Graham Ensell, Michael Kraft, Neil White||MEMS Mechanical Sensors||Artech House, Inc||2004|
|Jan G. Korvink, Oliver Paul||MEMS: A Practical Guide to Design, Analysis, and Applications||William Andrew, Inc||2006|