Microelectronics and Microsystems

Објавено: June 28, 2022
1. Course Title Microelectronics and Microsystems
2. Code 4ФЕИТ05Л024
3. Study program КХИЕ
4. Organizer of the study program (unit, institute, department) Faculty of Electrical Engineering and Information Technologies
5. Degree (first, second, third cycle) First cycle
6. Academic year/semester III/6 7. Number of ECTS credits 6
8. Lecturer D-r Katerina Raleva, D-r Josif Kjosev
9. Course Prerequisites Passed: Electronics 1
10. Course Goals (acquired competencies): At the completion of this course, students will have a deeper knowledge of microelectronic circuits engineering:
– understand microelectronic technologies (bipolar, MOS and CMOS)
– knowledge of process (photolithographic and diffusion) steps for designing bipolar NPN transistor and MOS transistors
– knowledge of CMOS process technology
– understanding lambda rules for designing CMOS integrated circuits
– knowledge of drawing stick diagrams for simple and complex logic gates in CMOS
– understanding different types of processes for manufacturing MEMS
– knowledge of basic CAD tools for integrated circuits design and skills for practical design of simple microelectronic and MEMS structures.
11. Course Syllabus: Introduction to microelectronic technologies (ITRS) and future trends. Silicon planar technology – processes and steps to fabricate integrated circuits (mono-crystal, photolithography; diffusion, epitaxy, oxidation, ion-implantation, metallization, technology simulation, packaging). SoC technology. 3D-integration. IC structures: sheet resistance, Irvin diagrams, pn-junction, Lorens-Vorner diagrams. Bipolar technology- bipolar transistors and characteristics. MOS-structures and characteristics. CMOS technology-fabrication, layout design rules -Lambda rules. Stick diagrams. Layout design of simple CMOS logic circuits using IC layout CAD systems. MEMS sensors and microsystems, processes integration, MEMS examples. MEMS sensor simulation.
12. Learning methods: Blended teaching method: lecturing, tutorials supported by presentations and visualization of concepts, active participation of students through tests and assignments, all supported by learning management system
13. Total number of course hours 3 + 1 + 1 + 0
14. Distribution of course hours 180
15. Forms of teaching 15.1. Lectures-theoretical teaching 45
15.2. Exercises (laboratory, practice classes), seminars, teamwork 30
16. Other course activities 16.1. Projects, seminar papers 15
16.2. Individual tasks 15
16.3. Homework and self-learning 75
17. Grading 17.1. Exams 10
17.2. Seminar work/project (presentation: written and oral) 10
17.3. Activity and participation 20
17.4. Final exam 60
18. Grading criteria (points) up to 50 points 5 (five) (F)
from 51to 60 points 6 (six) (E)
from 61to 70 points 7 (seven) (D)
from 71to 80 points 8 (eight) (C)
from 81to 90 points 9 (nine) (B)
from 91to 100 points 10 (ten) (A)
19. Conditions for acquiring teacher’s signature and for taking final exam Lectures and tutorials attendance and successful completion of lab exercises.
20. Forms of assessment During the semester, two partial written exams are provided (at the middle and at the end of the semester, lasting 120 minutes) and a test of laboratory exercises (after the exercises). The points from the partial exams, the points from the homework assignments and the points from the laboratory exercises.
In the planned exam sessions, a written exam is taken (duration 180 minutes). The final grade includes the points from the written exam, the points from the homework assignments and the points from the laboratory exercises.
It is allowed to use a calculator, but, it is not allowed to use books, scripts, manuscripts or notes of any kind during the exam, as well as mobile phone, tablet or any other electronic device.
21. Language Macedonian and English
22. Method of monitoring of teaching quality Internal evaluation and surveys
23. Literature
23.1. Required Literature
No. Author Title Publisher Year
1 Томислав Џеков Микроелектроника UKIM 1986
2 Ј.Ќосев Збирка решени примери од микроелектроника УКИМ 1989
3 Stephen D. Senturia Microsystem design Kluwer academic 2001
23.2. Additional Literature
No. Author Title Publisher Year
1 Richard C. Jaeger Introduction to microelectronic fabrication, 2nd еd Prentice Hall 2001