1. Course Title | Microelectronics and Microsystems | |||||||
2. Code | 3ФЕИТ05Л024 | |||||||
3. Study program | KHIE | |||||||
4. Organizer of the study program (unit, institute, department) | Faculty of Electrical Engineering and Information Technologies | |||||||
5. Degree (first, second, third cycle) | First cycle | |||||||
6. Academic year/semester | III/6 | 7. Number of ECTS credits | 6.00 | |||||
8. Lecturer | Dr Katerina Raleva | |||||||
9. Course Prerequisites | ||||||||
10. Course Goals (acquired competencies): Has deeper knowledge of microelectronic circuits engineering. Understands microelectronic technologies. Applies basic CAD tools for integrated circuits design and has skills for practical design of simple microelectronic structures. |
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11. Course Syllabus: Introduction to microelectronic technologies – ITRS. Monocrystal, photolithography; diffusion, epitaxy, oxidation, ion-implantation, metalization, technology simulation, packaging. IC structures: sheet resistance, Irvin diagrams, pn-junction, Lorens-Vorner Diagrams, MOS-structures and characteristics, bipolar transistors and characteristics. IC layout CAD systems. Hybrid IC.; MEMS and microsystems, processes integration, MEMS examples. Introduction to organic semiconductors. |
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12. Learning methods: | ||||||||
13. Total number of course hours | 3 + 1 + 1 + 0 | |||||||
14. Distribution of course hours | 180 | |||||||
15. Forms of teaching | 15.1. Lectures-theoretical teaching | 45 | ||||||
15.2. Exercises (laboratory, practice classes), seminars, teamwork | 30 | |||||||
16. Other course activities | 16.1. Projects, seminar papers | 15 | ||||||
16.2. Individual tasks | 15 | |||||||
16.3. Homework and self-learning | 75 | |||||||
17. Grading | 17.1. Exams | 15 | ||||||
17.2. Seminar work/project (presentation: written and oral) | 15 | |||||||
17.3. Activity and participation | 5 | |||||||
17.4. Final exam | 65 | |||||||
18. Grading criteria (points) | up to 50 points | 5 (five) (F) | ||||||
from 51 to 60 points | 6 (six) (E) | |||||||
from 61 to 70 points | 7 (seven) (D) | |||||||
from 71 to 80 points | 8 (eight) (C) | |||||||
from 81 to 90 points | 9 (nine) (B) | |||||||
from 91 to 100 points | 10 (ten) (A) | |||||||
19. Conditions for acquiring teacher’s signature and for taking final exam | Lectures and tutorials attendance and successful completion of lab exercises | |||||||
20. Forms of assessment | During the semester, two partial written exams are provided (at the middle and at the end of the semester, lasting 120 minutes) and a test of laboratory exercises (after the exercises). The points from the partial exams, the points from the homework assignments and the points from the laboratory exercises. In the planned exam sessions, a written exam is taken (duration 180 minutes). The final grade includes the points from the written exam, the points from the homework assignments and the points from the laboratory exercises. It is allowed to use a calculator, but, it is not allowed to use books, scripts, manuscripts or notes of any kind during the exam, as well as mobile phone, tablet or any other electronic device |
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21. Language | Macedonian and English | |||||||
22. Method of monitoring of teaching quality | ||||||||
23. Literature | ||||||||
23.1. Additional Literature | ||||||||
No. | Author | Title | Publisher | Year | ||||
1 | Richard C. Jaeger | Introduction to microelectronic fabrication, 2nd еd | Prentice Hall | 2001 | ||||
2 | Stephen D. Senturia | Microsystem design | Kluwer academic pub. | 2001 |