Course: Characterization of Micro and Nano-elements

Code: 3ФЕИТ08007

ECTS points: 6 ECTS

Number of classes per week: 3+0+0+3

Lecturer: Assoc. Prof. Dr. Lihnida Stojanovska – Georgievska

Course Goals (acquired competencies): The purpose of this course is to provide fundamental understanding of various aspects of the characterization on micro, but also on nano levels, which is of particular importance for modern engineers working in the field of micro and nanotechnology. This course provides an essential introduction to a wide range of modern measurement techniques that are used to analyze the structure and properties of micro and nano materials and devices.

Course Syllabus: Introduction: types of characterization techniques. Structural characterization – analysis of the structure, chemical composition and the presence of defects in the tested micro and nano structures, comprising: a microscopic techniques (SEM, TEM, AFM), X-ray diffraction XRD, spectroscopic techniques (X-ray photoelectron spectroscopy XPS, Raman spectroscopy, Fourier transform infrared spectroscopy FTIR), mass and optical spectroscopy. Electrical characterization – allows analysis of wide range of properties of micro and nano devices: density and distribution of the charge carriers, specific resistance, threshold voltage and flatband voltage, the presence of oxide and interface states, reliability of the devices. Types of electrical measurements: impedance analysis, current-voltage measurements, capacitance measurements, high-frequency and quasistatic measurements and evaluation of temperature dependence of electrical parameters.

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