Course: Nanometrology and Standardization
Code: 3ФЕИТ08018
ECTS points: 6 ECTS
Number of classes per week: 3+0+0+3
Lecturer: Prof. Dr. Hristina Spasevska
Course Goals (acquired competencies): Gain knowledge in the field of metrology in nanotechnology, characterization of nanostructures and standardization for the purpose of industrial production of nano products.
Course Syllabus: Introduction to metrology of micro and nanotechnologies.Terminology and nomenclature in nanotechnologies. Metrology techniques for measurement of nano values and limiting factors. Measurement of one-dimensional, two-dimensional and three-dimensional structures. Uncertainty in measurements of nano dimensions. Metrology principles for obtaining nano-industrial products. Standards in nanotechnologies, core areas of standardization in nanotechnologies.
Literature:
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Required Literature |
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No. |
Author |
Title |
Publisher |
Year |
|
1 |
Richard Leach | Fundamental Principles of Engineering Nanometrology | William Andrew | 2009 |
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2 |
Vladimir Murashov, John Howard | Nanotechnology Standards | Springer | 2011 |
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3 |
Günter Wilkening, Ludger Koenders | Nanoscale Calibration Standards and Methods | John Wiley & Sons | 2006 |
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Additional Literature |
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No. |
Author |
Title |
Publisher |
Year |
|
1 |
David J. Whitehouse | Handbook of Surface and Nanometrology | Taylor & Francis | 2010 |
|
2 |
Wei-Hong Zhong | Nanoscience and Nanomaterials: Synthesis, Manufacturing and Industry Impacts | DEStech Publications, Inc | 2012 |
