Nanometrology and Standardization
Course: Nanometrology and Standardization
ECTS points: 6 ECTS
Number of classes per week: 3+0+0+3
Lecturer: Prof. Dr. Hristina Spasevska
Course Goals (acquired competencies): Gain knowledge in the field of metrology in nanotechnology, characterization of nanostructures and standardization for the purpose of industrial production of nano products.
Course Syllabus: Introduction to metrology of micro and nanotechnologies.Terminology and nomenclature in nanotechnologies. Metrology techniques for measurement of nano values and limiting factors. Measurement of one-dimensional, two-dimensional and three-dimensional structures. Uncertainty in measurements of nano dimensions. Metrology principles for obtaining nano-industrial products. Standards in nanotechnologies, core areas of standardization in nanotechnologies.
|Richard Leach||Fundamental Principles of Engineering Nanometrology||William Andrew||2009|
|Vladimir Murashov, John Howard||Nanotechnology Standards||Springer||2011|
|Günter Wilkening, Ludger Koenders||Nanoscale Calibration Standards and Methods||John Wiley & Sons||2006|
|David J. Whitehouse||Handbook of Surface and Nanometrology||Taylor & Francis||2010|
|Wei-Hong Zhong||Nanoscience and Nanomaterials: Synthesis, Manufacturing and Industry Impacts||DEStech Publications, Inc||2012|