Nanometrology and Standardization

Објавено: February 28, 2019

Nanometrology and Standardization

Course: Nanometrology and Standardization

Code: 3ФЕИТ08018

ECTS points: 6 ECTS

Number of classes per week: 3+0+0+3

Lecturer: Prof. Dr. Hristina Spasevska

Course Goals (acquired competencies): Gain knowledge in the field of metrology in nanotechnology, characterization of nanostructures and standardization for the purpose of industrial production of nano products.

Course Syllabus: Introduction to metrology of micro and nanotechnologies.Terminology and nomenclature in nanotechnologies. Metrology techniques for measurement of nano values and limiting factors. Measurement of one-dimensional, two-dimensional and three-dimensional structures. Uncertainty in measurements of nano dimensions. Metrology principles for obtaining nano-industrial products. Standards in nanotechnologies, core areas of standardization in nanotechnologies.

Literature:

Required Literature

No.

Author

Title

Publisher

Year

1

Richard LeachFundamental Principles of Engineering NanometrologyWilliam Andrew2009

2

Vladimir Murashov, John HowardNanotechnology StandardsSpringer2011

3

Günter Wilkening, Ludger KoendersNanoscale Calibration Standards and MethodsJohn Wiley & Sons2006

Additional Literature

No.

Author

Title

Publisher

Year

1

David J. WhitehouseHandbook of Surface and NanometrologyTaylor & Francis2010

2

Wei-Hong ZhongNanoscience and Nanomaterials: Synthesis, Manufacturing and Industry ImpactsDEStech Publications, Inc2012